POSITION AND ATTITUDE MEASUREMENT FOR MICRO MANIPULATOR BY DIFFRACTED LIGHT PROVE |
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| Yusuke Inoue, Ichirou Ishimaru, Gen Hashiguti |
- Abstract:
- In the present study, we investigate the removal of extremely minute materials via a micro manipulator. This operation requires measurement and control of the position and attitude of the micro manipulator at a sub-micrometer level. Therefore, a miniature instrumentation sensor having six degrees-of-freedom is necessary. We devised a technology that measures the diffracted light from minute slits formed on the micro manipulator which enables the position and attitude to be measured in six degrees-of-freedom simultaneously using only one laser light.
In the present paper, we report the result of a trial production of minute slits formed by anisotropy etching at a high forming precision. We optimized the design of this minute slits based on Fraunhofer diffraction theory. In addition, we discuss the feasibility of the proposed technology as well as the experimental results of diffracted light distribution from these slits. - Keywords:
- MEMS, measurement, diffracted light
- Download:
- PWC-2003-TC17-001.pdf
- DOI:
- -
- Event details
- Event name:
- XVII IMEKO World Congress
- Title:
Metrology in the 3rd Millennium
- Place:
- Dubrovnik, CROATIA
- Time:
- 22 June 2003 - 28 June 2003