NEW DEVELOPMENTS OF MEASUREMENT STANDARDS AND PROCEDURES FOR MICRO AND NANOMETROLOGY AT THE PTB |
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| Ulrich Neuschaefer-Rube, Michael Neugebauer, Thorsten Dziomba, Hans-Ulrich Danzebrink, Ludger Koenders, Harald Bosse |
- Abstract:
- The contribution provides an overview on new developments of standards and measurement methods for 3D-micro- and nanometrology with a focus on recent work at the PTB. These developmentstarget at a reduction of measurement uncertainty of instruments used for dimensional characterization of micro- and nanostructures. The developments in 3D-micrometrology will focus on standards for calibration of micro-CMM, for dimensional micro-CT instrumentation and for microcontour measurement. For different applications in nanometrology calibration standards for unidirectional measurands like 1D-, 2D- and 3D-position as well as step height and for bidirectional measurands like linewidth or diameter will be described. In addition the potential to make use of crystalline lattice structuresto provide traceability for dimensional measurements at the nanoscale will be addressed.
- Keywords:
- 3D-micrometrology, nanometrology, metrological traceability, standards, measurement uncertainty
- Download:
- IMEKO-TC14-2013-PL-04.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 ISMQC 2013
- Title:
11th International Symposium on Measurement and Quality Control
- Place:
- Cracow and Kielce, POLAND
- Time:
- 11 September 2013 - 13 September 2013