METROLOGICAL CHARACTERIZATION OF DIGITAL MEMS ACCELEROMETERS IN DYNAMIC CONDITIONS: AN INVESTIGATION OF LINEARITY IN AMPLITUDE AND TEMPERATURE EFFECTS

A. Schiavi, A. Prato, F. Mazzoleni, A. Facello, A. Kwitonda
Abstract:
In several applications, such as industrial plants monitoring, or peculiar manufacturing process, the sensors are subjected to a wide range of acceleration amplitude levels or shocks, as well as thermal changes, that could affect the micro electro-mechanical inner parts, altering their performance and reliability. In this work, by applying a calibration procedure developed at INRIM, the main sensitivity of digital MEMS accelerometers is evaluated, as a function of amplitude, in the frequency domain. Moreover, a survey of temperature drift, from -20 °C up to 80 °C, is also performed, to characterize the suitability of digital MEMS accelerometers for actual applications.
Keywords:
digital MEMS accelerometer; calibration; amplitude; thermal effects
Download:
IMEKO-TC22-2022-033.pdf
DOI:
10.21014/tc22-2022.033
Event details
IMEKO TC:
TC22
Event name:
TC22 Conference 2022
Title:

5th TC22 Conference on Vibration Measurement (together with the 24th TC3 Conference on the Measurement of Force, Mass and Torque, the 14th TC5 Conference on the Measurement of Hardness, and the 6th TC16 Conference on Pressure and Vacuum Measurement)

Place:
Cavtat-Dubrovnik, CROATIA
Time:
11 October 2022 - 13 October 2022
Event details
IMEKO TC:
TC22
Event name:
TC22 Online Workshop 2023
Title:

IMEKO TC22 Online Workshop on Low-Frequency Vibration Metrology

Registration deadline: 1 April 2023

Dates and times: 4 to 5 April 2023, 12 PM to 2 PM CET

Brief description: Technical Committee 22 (TC22) “Vibration Measurement” of the International Measurement Confederation (IMEKO) (www.imeko.org) invites all interested persons to participate in its online workshop on low-frequency vibration metrology, to be held online on 4 to 5 April 2023, from 12 PM to 2 PM Central European Time each day. Low-frequency vibration traceability is a topic of focused interest and development around the world, see for example the Infra-AUV project of Euramet.

Place:
ONLINE,
Time:
04 April 2023 - 05 April 2023