The improved nano-profile measurement technique by scanning an optically trapped microprobe is proposed, which is used as a sensor to read a standing wave scale (SWS) based on the interpolation method. An axial position of the optically trapped microprobe was measured using a chromatic confocal system to interpolate the SWS with high accuracy and high resolution. The length and the resolution of the interpolated SWS (iSWS) could be achieved 2.1 µm and 20 nm, respectively. In order to verify the validity of the proposed microprobe technique, the surface profile measurement of a glass small lens with accuracy higher than 50 nm was demonstrated.

This paper presents a feature-based model for probe path planning prismatic parts. Needed geometrical information for feature description are taken from files IGES and STL. Presented model is advanced feature – based inspection approach, whose advantage is in reduction the total measurement time by reducing the time needed for the preparation of the measurements and allowed opportunities for its optimization.

Some measuring systems are characterized by parameters that are difficult to identify directly. The reason for this can be, for example, that some elements of the system are placed inside other ones and therefore it is difficult to reach them and to measure their dimensions. In such cases the parameters of the system can be evaluated with the use of measurement data. The paper presents the procedure of such evaluation and the example of its practical application.

The paper presents the assumptions and theoretical background of estimation the coordinate measurement uncertainty. The uncertainty for each characteristic is estimated separately. Mathematical model for each characteristic uses the minimal number of points of the measured workpiece. Each characteristic is defined by a formula presented in a form of function of coordinates’ differences’ of those points. The applied algorithms use the type B method according to the rules of GUM.

Coordinate Measuring Arms (CMA) are devices that differ in many respects from conventional coordinate measuring machines (CMM). They have from 5 to 7 rotating pairs, in which the encoders are placed. These devices are manual, mobile, redundant, and at least 3 axes have a full rotation. Therefore, in this article, the method of development of CAA correction matrix for the CMA is described. What is a completely different issue of the development of CAA correction matrix for the conventional CMM.