Characterization of quantum-weight generating cantilever device
Abstract
Quantum-weight generating cantilever devices comprising a 20 micron-sized ringshaped Niobium film deposited on the paddle of an ultrasoft single-crystalline silicon cantilever were characterized. High-quality niobium film was patterned by optical lithography and deposited using an ultra-high-vacuum sputter system within the microfabrication process of cantilevers, which adopts double-side reactive-ion-etching. The fabricated niobium film was observed using scanning electron microscope and atomic force microscope, and its superconducting property was also examined from lowtemperature resistivity measurement. Thermal noise spectrum and frequency scan of cantilever vibration were measured at a room temperature to obtain resonance frequencies and quality factors of the device.
Event details
- Event
- Cultivating Metrological Knowledge
- Linked User
- Dirk Röske
- Technical Committee
- TC3
- Place
- Merida, MEXICO
- Time
- 27 November 2007 - 1 December 2007
- Website
- http://www.cenam.mx/fyp/imeko2.html