Traceability to SI units for Vacuum Measurement in Industrial applications

Karl Jousten

Abstract

In the context of international standards like the ISO 9000 series or ISO 17025 the traceability of measurement instruments of physical units in industrial processes gained more importance in the last two decades, so to say also for vacuum measurement. Traceable calibrations of vacuum gauges ensure agreement with the SI units. For this purpose vacuum primary standards are needed. The international system of metrology ensures that the vacuum primary standards registered in the system are equivalent and fulfil their specifications. Secondary and reference standards are used to disseminate the pressure scale in vacuum to calibration laboratories, to the manufacturers of gauges, and finally to industrial processes or to research facilities. Suitable vacuum gauges for this purpose including their expected measurement uncertainties will be described. Notes for the measurement uncertainties at the place of the end user will be given.

Keywords

vacuum metrology, primary standard, traceability, vacuum gauges, accuracy, uncertainty

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IMEKO-TC16-2007-KL-033u.pdf

DOI

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IMEKO TC

TC16 - Pressure and Vacuum Measurement

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