The Development Of Vacuum Measurements Down To Extremely High Vacuum –XHV

Anita Calcatelli

Abstract

The available measuring devices in the ultra high and extreme high vacuum range with their limitations are presented on the basis of the ultimate attainable pressure. New miniature gauges and calibration devices up now available are shortly reviewed. A complete bibliography is presented.

Keywords: vacuum, gauge, ionization, desorption, ESD, photocurrent
Download: IMEKO-TC16-2007-KL-034u.pdf
DOI: -
IMEKO TC: TC16 - Pressure and Vacuum Measurement

Event details

Event: Cultivating Metrological Knowledge
Technical Committee: TC16
Place: Merida, MEXICO
Time: 27 November 2007 - 1 December 2007
Website: http://www.cenam.mx/fyp/imeko2.html

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