Three technologies met in the absolute pressure range 0,5 Pa to 3 Pa

Pierre Otal, Jean-Claude Legras

Abstract

The LNE standards around 1 Pa absolute are constituted by a force-balanced piston gauge (FPG), 100 Pa capacitance diaphragm gauges (CDGs), and spinning rotor gauges (SRGs). The key parameters limiting the performance of the devices are presented. The results of a comparison involving at the same time the three instruments are presented and discussed, as well as the capabilities of these instruments in this range. As an example, the repeatability of measurements, and the linearity error in the comparison are less than 2 mPa.

Keywords

capacitance diaphragm gauge, spinning rotor gauge, force piston gauge, thermal transpiration effect

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IMEKO-TC16-2007-038u.pdf

DOI

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IMEKO TC

TC16 - Pressure and Vacuum Measurement

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