Development of primary calibration system for high frequency range up to 10 kHz

Akihiro Oota, Takashi Usuda, Hideaki Nozato, Tamio Ishigami, Hisayuki Aoyama, Katsuhisa Kudo

Abstract

In this paper, a new primary calibration system for the frequency range from 5 kHz to 10 kHz at the National Metrology Institute of Japan (NMIJ) is reported. In the high frequency range, the displacement amplitude becomes small and the effects of parasitic motion, such as drift motion and external noise, become greater with increasing frequency. Therefore, the realization of the primary calibration system becomes difficult. The new primary calibration system for the high frequency range is implemented with a newly designed laser interferometer and a new signal processing algorithm, which is named the multiple sinusoidal approximation method. The new designed laser interferometer has a twofold optical path to detect a small displacement with high accuracy, as well as a flexible alignment mechanism for the measurement position. The multiple sinusoidal approximation method can correct the effect of parasitic motion, which leads to high accuracy acceleration measurement. As a result, the new primary calibration system has realized a calibration capability within an expanded uncertainty of 0.5%.

Keywords

acceleration, twofold optical path laser interferometer, multiple sinusoidal approximation method, drift motion

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IMEKO-TC22-2007-103u.pdf

DOI

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IMEKO TC

TC22 - Vibration Measurement

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