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UNCERTAINTY EVALUATION OF MODULUS AND HARDNESS FOR THE NANOINDENTATION MEASUREMENT SYSTEM

Jiong-Shiun Hsu, Sheng-Jui Chen, Hui-Ching Lu, Shear-Shi Pan, Gwo-Jen Wu, Chung-Lin Wu, Chin-fen Tuan

Abstract

The uncertainties of nanoindentation measurement system were evaluated in this paper. A precise electonic balance and an optical interferometric system were respectively utilized to calibrate the force and displacement of nanoindentation measurement system. The uncertainties of reduced modulus and indentation hardness providing from the naoindentaion measurement were respectively obtained.

Keywords
uncertainty, nanoindentation
Download
IMEKO-TC5-2007-004.pdf
DOI
-
IMEKO TC
TC5 - Hardness Measurement

Event details

Event
Symposium on Recent Advancements in the Theory and Practice of Hardness Measurement
Technical Committee
TC5
Place
Tsukuba, JAPAN
Time
19 November 2007 - 21 November 2007
Website
http://www.hardmeko2007.org

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