UNCERTAINTY EVALUATION OF MODULUS AND HARDNESS FOR THE NANOINDENTATION MEASUREMENT SYSTEM
Abstract
The uncertainties of nanoindentation measurement system were evaluated in this paper. A precise electonic balance and an optical interferometric system were respectively utilized to calibrate the force and displacement of nanoindentation measurement system. The uncertainties of reduced modulus and indentation hardness providing from the naoindentaion measurement were respectively obtained.
Event details
- Event
- Symposium on Recent Advancements in the Theory and Practice of Hardness Measurement
- Technical Committee
- TC5
- Place
- Tsukuba, JAPAN
- Time
- 19 November 2007 - 21 November 2007
- Website
- http://www.hardmeko2007.org