HARDNESS MEASUREMENT OF COATING THIN FILM BY INDENTATION PROFILE OBSERVATION USING SCANNING PROBE MICROSCOPY

Shigeo Sato, Masayuki Sato

Abstract

According to the principle of a conventional Vickers (Berkovich) hardness measurement, hardness is calculated from diagonal lengths or side lengths of indentation. The diagonal length, the conjunction line length of pyramidal indentation, and the distance from the vertex to the base of trigonal pyramidal indentation are measured accurately by observing a vertical cross section. Scanning probe microscopy (SPM) is a good method for observing the vertical and horizontal cross sections of the indentation. However, such parameters in the cross section profile must be defined as the principle of the method to obtain a reliable nano-hardness value.

Keywords

nano-indentation, scanning probe microscopy, nano-haradness

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IMEKO-TC5-2007-022.pdf

DOI

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IMEKO TC

TC5 - Hardness Measurement

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