PROGRAMABLE SYSTEM FOR LOW FREQUENCY NOISE MEASUREMENTS IN MICROELECTRONICS DEVICES CONTACTED BY POINT PROBES

Arkadiusz Szewczyk, Ludwik Spiralski, Gérard Ghibaudo, Gilles Reimbold, J. A. Chroboczek

Abstract

A novel system for low frequency noise, LFN, wafer-level (point probe) measurements and a method of the system calibration with the thermal noise of resistances are discussed. We also present some LFN data on MOSFETs as an example of implementing the LFN measurement technique for the device quality diagnostics.

Keywords

Noise measurements, MOSFET

Download

PWC-2003-TC4-052.pdf

DOI

-

IMEKO TC

TC4 - Measurement of Electrical Quantities

Back to the proceedings