MICROSYSTEM FOR CAPACITIVE FORCE AND TORQUE MEASUREMENT
Abstract
In the fields of automation, drives and production engineering the measurement of force and torque is of particular importance for the monitoring and control of industrial processes. Today’s sensors applied for this purpose are mostly based on strain gauges with a limited range of applications. Reasons therefore are rooted in the short duty cycle, the poor overload safety and the complex mounting. In order to avoid the disadvantages mentioned an innovative micro-system based capacitive force and torque sensor has been developed. By attachment at two distinguished points the sensor is mountable in an easy and robust manner on static and rotating parts.
Event details
- Event
- Joint International Conference on Force, Mass, Torque, Hardness and Civil Engineering Metrology in the age of globalization
- Technical Committee
- TC3
- Place
- Celle, GERMANY
- Time
- 24 September 2002 - 26 September 2002