DESIGN AND FABRICATION OF A THREE-COMPONENT FORCE SENSOR USING MICROMACHINING TECHNOLOGY

Jongho Kim, Yonkyu Park, Daeim Kang

Abstract

This paper describes a design methodology of a tri-axial silicon-based force sensor with square membrane by using micromachining technology (MEMS). The sensor has a maximum force range of 5 N and a minimum force range of 0.1 N in the three-axis directions. A simple beam theory was adopted to design the shape of the micro-force sensor. Also the optimal positions of piezoresistors were determined by the strain distribution obtained from the commercial finite element analysis program, ANSYS. The Wheatstone bridge circuits were designed to consider the sensitivity of the force sensor and its temperature compensation. Finally the process for microfabrication was designed using micromachining technology.

Keywords: force sensor, MEMS, beam theory, piezoresistor, finite element analysis
Download: IMEKO-TC3-2002-036.pdf
DOI: -
IMEKO TC: TC3 - Measurement of Force, Mass, Torque, and Gravity

Event details

Event: Joint International Conference on Force, Mass, Torque, Hardness and Civil Engineering Metrology in the age of globalization
Technical Committee: TC3
Place: Celle, GERMANY
Time: 24 September 2002 - 26 September 2002

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