DESIGN AND FABRICATION OF MEMS BASED AC VOLTAGE REFERENCE
Abstract
This work explores the MEMS potentialities to fabricate flexible AC voltage references through mechanical-electrical transduction that could be used for high precision electrical metrology or for applications in miniaturized instrumentation. The design presented allows the generation of AC voltage reference ranging from 1V to 60 V using the same Epitaxial Silicon On Insulator (SOI) Surface Micromachining process that permits an accurate control of both dimensions and material properties. Different tests structures have been designed and fabricated. First results show a good agreement between the calculated and the measured characteristics of the devices and the performance, stability and reliability of these systems is still under investigation. Moreover, a technological process for metallic membranes has been developed and used to manufacture MEMS devices in the shape of cantilevers and bridges on coplanar lines. On wafer measurements will be used to compare the characteristics of both technological options (SOI and low stress metallic membrane).
Event details
- Event
- Exploring New Frontiers of Instrumentation and Methods for Electrical and Electronic Measurements
- Technical Committee
- TC4
- Place
- Florence, ITALY
- Time
- 22 September 2008 - 24 September 2008
- Website
- http://www.imeko2008.org/