A NOVEL SOL-GEL-BASED SENSOR FOR HUMIDITY DETECTION
Abstract
In the last years there were widespread uses and applications of humidity sensors in many different fields. In response to this situation, various kinds of humidity sensors, based on different materials and sensing principles, have been developed. The paper proposes a novel resistive humidity sensor based on cobalt doped silica thin film deposited on a quartz support by means of a sol-gel technology. This represents a first step in the realization of an integrated sensor able to measure both umidity and gas in environmental pollution applications.
Event details
- Event
- Exploring New Frontiers of Instrumentation and Methods for Electrical and Electronic Measurements
- Technical Committee
- TC4
- Place
- Florence, ITALY
- Time
- 22 September 2008 - 24 September 2008
- Website
- http://www.imeko2008.org/