INTEGRATED BLOOD FLOWMETER USING MICROMACHINING TECHNOLOGY

Yukie Omori, Renshi Sawada, Susumu Sakano

Abstract

The micro machining technology has been advanced on the basis of the semiconductor manufacturing technology. In this study, the research on the manufacturing the integrated micro optical sensor accumulated LD and PD on the semiconductor substrate is practiced. The fabrication method is the technology of photolithography and etching technology in the semiconductor manufacturing. The blood flow meter is taken up as a typical application of the micro optical sensor.

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IMEKO-TC4-2004-082.pdf

DOI

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IMEKO TC

TC4 - Measurement of Electrical Quantities

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