THERMAL DESORPTION MASS SPECTROMETRY (TDS): APPLICATION ON MASS METROLOGY

Zaccaria Silvestri, Patrick Pinot

Abstract

A new device has been developed for the study of physisorbed elements on polished and large surface used in mass metrology.<br />This technique, based on the analysis by mass spectrometry of desorbed molecules caused by heating under vacuum from the analyzed surface, is presented.<br />The first application of this device is the study of the current and future mass standards to understand the reactivity of their surface depending of the storage conditions, of the cleaning process and polishing method. So, an example of surface contamination analysis by thermal desorption mass spectrometry (about cleaning effect on a super alloy based on cobalt) is given.

Keywords

mass spectrometry, thermal desorption, cleaning effect, contamination

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IMEKO-WC-2009-TC3-025.pdf

DOI

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IMEKO TC

TC3 - Measurement of Force, Mass, Torque, and Gravity

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