DESIGN, FABRICATION AND ELECTROMECHANICAL CHARACTERISTICS OF A MEMS BASED MICROMIRROR

Talari Rambabu, Mita Dutta

Abstract

In this paper the design, fabrication and electromechanical characteristics of a electrostatic torsional micromirror is presented. In addition to that the static characteristics of a micro-mirror based on the parallel-plate capacitor model are described.

Keywords: MEMS, Micro-mirror, Snap-down
Download: IMEKO-WC-2009-TC3-028.pdf
DOI: -
IMEKO TC: TC3 - Measurement of Force, Mass, Torque, and Gravity

Event details

Event: XIX IMEKO World Congress
Place: Lisbon, PORTUGAL
Time: 6 September 2009 - 11 September 2009
Website: http://www.imeko2009.it.pt/

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