STUDY OF CERTIFIED REFERENCE MATERIAL PREPARATION TECHNIQUE FOR MICROELECTRONIC DIGITAL CIRCUITS

Senzu Shen, Wenjun Chang, Hua Li, Qian Liu, Minghu Zhang

Abstract

This paper introduces an alternative method to traditional certified reference material (CRM) preparation technique for microelectronic digital circuits. Instead of self-manufacturing chips, a novel preparation technique is introduced which selects matured samples as the CRMs, these samples are also called certified reference samples (CRSs). The use of CRS not only greatly reduces the difficulties of preparation, but also brings microelectronic CRM preparation technique to a new domain. Finally, the preparation contents and methods, the preparation processes, as well as the maintenance, preservation and usage of the CRS are discussed in detail in this paper.

Keywords

Microelectronic Digital Circuit, Certified Reference Material (CRM), Certified Reference Sample (CRS)

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IMEKO-WC-2009-TC8-088.pdf

DOI

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IMEKO TC

TC8 - Traceability in Metrology

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