ANALYSIS OF MEASUREMENT UNCERTAINTY IN THE PROCEDURE OF GROOVE DEPTH MEASUREMENT

Gorana Baršic, Biserka Runje, Sanjin Mahovic

Abstract

This paper presents summary of influencing quantities in the procedure of measurement groove depth <i>d</i> by use of Epival-Interphako interferometric microscope. The expression of mathematical model describing the dependence of measured depth of groove <i>d</i> in relationship with all of the influencing components has been presented.<br />Influencing quantities have been analyzed, and the magnitudes of contribution of those quantities that are considered to have the largest influence on uncertainty of the result have been calculated.<br />This analysis has been done based on guidelines for calculation of measurement uncertainty: ISO Guide to the Expression of Uncertainty in Measurement (GUM) and Supplement 1 to the GUM – Propagation of distribution using a Monte Carlo method.

Keywords

measurement uncertainty, interferometric microscope, Monte Carlo method

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IMEKO-WC-2009-TC14-111.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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