CONTACTLESS DIAGNOSTICS OF THIN FILM LAYERS

Vaclav Papez, Stanislava Papezova

Abstract

Thin layer resistance measurement using the change of complex coil impedance is a contact-less method for conductive layer diagnostics. The analysed sample is inserted into the leakage field of the coil. Our conclusions of a theoretic analysis have been verified in experimental arrangement with a measuring coil and a vector impedance meter. The layer sheet resistance is evaluated by electronic system. A special algorithm, ensuring the explicit evaluation of the measuring, is used for determination of the layer sheet resistance.

Keywords

thin film diagnostics

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IMEKO-WC-2009-TC10-371.pdf

DOI

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IMEKO TC

TC10 - Measurement for Diagnostics, Optimization and Control

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