INVESTIGATIONS OF NEW SILICON LOAD CELLS WITH THIN-FILM STRAIN GAUGES

Sascha Mäuselein, Oliver Mack, Roman Schwartz, Gerd Jäger

Abstract

This paper discusses the usability of load cells (LCs) made of single crystalline silicon (Si) mechanical springs with sputtered-on thin-film strain gauges (SGs) as sensors for force and weighing measurements. Experimental investigations of the characteristic line in a temperature range from -10 °C to 40 °C concerning reproducibility, hysteresis and linearity are presented. The results offer the usability of the Si LC in the range of precision measurement if temperature behaviour of sensitivity and linearity are compensated.

Keywords

silicon, load cell, strain gauge

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IMEKO-WC-2009-TC3-374.pdf

DOI

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IMEKO TC

TC3 - Measurement of Force, Mass, Torque, and Gravity

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