IMPROVEMENT OF MEASUREMENT ACCURACY BY COMBINED EVALUATION OF CMM AND TRACKING INTERFEROMETER MEASUREMENTS

Frank Härtig, Christian Keck, Karin Kniel, Heinrich Schwenke, Franz Wäldele, Klaus Wendt

Abstract

This paper presents a novel approach to improve the accuracy of coordinate measuring machines (CMM) by integrating a single high precision tracking interferometer (TI) as an additional measurement axis. Improved positions are obtained by a combination of the CMM positions as read from the scales and the distances produced by the TI. Monte-Carlo simulations of length and flatness measurements show that the uncertainties can be reduced considerably by an appropriate configuration. First measurements confirm the results of preliminary simulations.

Keywords

Co-ordinate measuring machines, Tracking interferometer, Dimensional measurements

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PWC-2003-TC7-029.pdf

DOI

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IMEKO TC

TC7 - Measurement Science

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