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DEVELOPMENT OF A LOW–COST MEASUREMENT SYSTEM FOR CUTTING EDGE PROFILE DETECTION

Gregor Gerstorfer, Bernhard G. Zagar

Abstract

This paper describes the use of a CD pickup head as a displacement measurement system. First, the components contained in a pickup head are explained and how they are combined to obtain the functionality of a pickup head. Afterwards, the application of measuring a knife edge profile is introduced.The results revealed some insuffiencies with the current system. Nevertheless, the cutting edge’s radius of curvature can be estimated.

Keywords
optical pickup head, CD, profile measurement.
Download
IMEKO-TC2-2010-06.pdf
DOI
-
IMEKO TC
TC2 - Photonics

Event details

Event
TC2 Symposium 2010
Technical Committee
TC2
Place
Hangzhou, CHINA
Time
11 September 2010 - 13 September 2010
Website
http://imeko2010.cjlu.edu.cn

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