OPTICAL PROFILOMETER FOR QUALITY CONTROL OF SOLDERING JOINTS

J. Lettner, G. Gerstorfer, B. G. Zagar

Abstract

A low cost 3D non–contacting profile scanning method for both specular and diffuse reflecting surfaces will be presented. The resolution in x– and y–directions is about 650 nm and 1 μm in out of plane direction. The method is based on a commercially available CD pickup head. The CD pickup head will be driven in a way that the error of focus signal is used for an out of plane measurement (optical profilometer). Theoretical relations as well as measurement results will be shown in this proposed paper.

Keywords

optical profilometer, non–contacting measurement, optical inspection technique

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IMEKO-WC-2012-TC2-O3.pdf

DOI

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IMEKO TC

TC2 - Photonics

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