RAMAN DIAGNOSTICS OF CVD DIAMOND GROWTH

Marcin Gnyba

Abstract

Development of Raman spectroscopic system for diagnostics of growth of diamond and BDD (Boron- Doped-Diamond) thin films during μPA CVD (Microwave Plasma Assisted Chemical Vapour Deposition) process is described. Raman studies of such films were carried out as in-situ monitoring of film deposition as ex-situ measurements conducted for a sample outside the reaction vessel after manufacturing process. Modular system for the in-situ monitoring equipped with fibre-optic probes, was designed and tested. Moreover, Raman and optical microscopy were applied after the process for more detailed study of the deposited films. Solid state lasers having wavelength of 532 nm were applied as the excitation sources. The most significant parameters of the deposited films like their molecular composition, presence of defects and rate of the film growth were evaluated.

Keywords

Raman spectroscopy, optical measurements, in-situ monitoring, CVD, diamond layers

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IMEKO-WC-2012-TC2-P2.pdf

DOI

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IMEKO TC

TC2 - Photonics

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