NANOPOSITIONING SYSTEM WITH COMBINED FORCE MEASUREMENT BASED ON ELECTROMAGNETIC FORCE COMPENSATED BALANCES

Christian Diethold, Falko Hilbrunner, Thomas Fröhlich, Eberhard Manske

Abstract

This paper discusses a novel nanopositioning system which is based on an electromagnetic force compensated (EMC) balance. In addition to the positioning the actuating force can also be measured. This enables the measurement of force displacement curves of springs with a wide variety of spring constants. The measurement range of the spring constants is up to 10¹⁰ N/m with a maximum resolution of about 0.01 N/m. Compared to other principles for measuring the spring constant the introduced method is more sophisticated. Both force as well as the displacement can be measured traceable and simultaneously.

Keywords

nanopositioning system, force displacement measurement, electromagnetic force compensated balances

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IMEKO-WC-2012-TC3-O16.pdf

DOI

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IMEKO TC

TC3 - Measurement of Force, Mass, Torque, and Gravity

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