COMPARISON OF MILLIGRAM SCALE DEADWEIGHT FORCES TO ELECTROSTATIC FORCES

Sheng-Jui Chen, Sheau-Shi Pan and Yi-Ching Lin

Abstract

This paper presents a comparison of milligram scale deadweight forces to electrostatic forces that is generated from an electrostatic sensing & actuating force measurement system recently built in Center for Measurement Standards, Industrial Technology Research Institute (CMS/ITRI). In the first section, we briefly introduce the electrostatic sensing and actuating force measurement system, and then we describe the experimental setup for the comparison and the results. Finally, we give a discussion and outlook.

Keywords

deadweight force, electrostatic force, electrostatic actuation, capacitive position sensing, force balance

Download

IMEKO-WC-2012-TC3-O29.pdf

DOI

-

IMEKO TC

TC3 - Measurement of Force, Mass, Torque, and Gravity

Back to the proceedings