METROLOGICAL ATOMIC FORCE MICROSCOPE AND TRACEABLE MEASUREMENT OF NANO DIMENSION

S. Gao, W. Li, M. Lu, Y. Shi, X. Tao, H. Du

Abstract

A metrological AFM is designed to establish a traceable standard with nanometer uncertainty. The principle and design of the instrument is introduced in this paper. The displacement of the sample is traced to the SI unit by interferometers. The metrological AFM is applied to step height and line width measurement. The results are compared with optical instrument and profilometers. The metrological AFM participates step height international comparison and the result shows an uncertainty less than 2 nm.

Keywords

AFM, nanometrology, step height

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IMEKO-WC-2012-TC4-O27.pdf

DOI

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IMEKO TC

TC4 - Measurement of Electrical Quantities

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