POWER SUPPLY SENSITIVITY OF MEMS GYROSCOPES

M. Vágner, P. Beneš

Abstract

Little is known about a sensitivity of MEMS gyroscopes to a power supply fluctuation and how to measure these effects. This information can be helpful to improve a performance of sensors, which is crucial especially for an inertial navigation. The paper is focused on the zero rate drift and the behavior of a build-in temperature sensor. These properties are analyzed for MEMS gyroscopes of various brands with different output configurations. The method of our measurement and underlying problems are described. Finally, results of the experiment are discussed and suitable models are suggested.

Keywords

MEMS, gyroscope, zero rate supply drift, temperature sensor supply drift, power supply voltage, selfheating

Download

IMEKO-WC-2012-TC4-P27.pdf

DOI

-

IMEKO TC

TC4 - Measurement of Electrical Quantities

Back to the proceedings