CAPABLE PROCESSES BY OPTICAL METROLOGY

Tilo Pfeifer, Gerd Dussler, Michael Zacher, Alexander Bai

Abstract

Today, optical metrology is already an essential factor for manufacturing processes. Within different tasks optical metrology guarantees increasing capability of processes. Optical measurement techniques secure fast and precise process steps. Therefore, optical methods integrated into manufacturing lines are well suited for measurement tasks. Their setups are modular and they have defined interfaces to the electronic periphery. Further, optical measurement techniques are very versatile, flexible and most accurate. They are used more and more for noncontact distance measurement, shape and surface inspection as well as for analysis of dynamic processes. Due to their ability for miniaturisation optical sensors are well suited for the direct use in manufacturing systems and production environment.
Thus, the goal of this article is to illustrate the efficient use of optical measurement systems in different manufacturing processes. Detailed examples show that optical metrology is a key factor for sucessful manufacturing. Finally, perspectives and trends of optical measurement techniques in the field of production technology will be presented.

Keywords

Optical Metrology, Manufacturing Process, Quality Control

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PWC-2003-KL-001_TC2.pdf

DOI

-

IMEKO TC

TC2 - Photonics

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