TACTILE-OPTICAL MICROPROBES APPLIED TO DIMENSIONAL MEASUREMENT AND EVALUATION OF MICROFEATURES

C. R. Baldo, D. M. Yamanaka, D. C. B. Silva

Abstract

The miniaturization of parts and components and the growing demand for more accurate measurements have led to ongoing development in the field of dimensional metrology. The development of new sensors mounted on coordinate measuring machines, has enabled metrologists to handle dimensional engineering challenges. Probing systems that combine mechanical and optical principles and provide three-dimensional information about micro-scale features in micro- and meso-scale components are outlined in this paper. Real application cases are reported and their practical issues discussed under a metrology view.

Keywords

microprecision dimensional metrology, multisensor coordinate metrology, tactile-optical probes

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IMEKO-WC-2012-TC14-O5.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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