ULTRA-PRECISION SET-UP AND REVERSAL TECHNIQUE FOR THE ERROR MAPPING OF A 2D SENSOR

M. Valenzuela, J. A. Yagüe, J. A. Albajez, J. J. Aguilar

Abstract

In this paper a calibration technique for the error mapping of a 2D sensor - a cross-grid encoder – is presented. A reversal technique to assess the squareness errors is used. The calibration set up includes a metrology frame made of Zerodur®, a very low coefficient thermal expansion material in order to reduce thermal errors. Additionally, an analysis by means of finite element method is carried out for an adequate design of the set up. Finally, the uncertainty values for the 2D cross-grid encoder system are calculated.

Keywords

calibration, reversal technique, 2D sensor, Zerodur, uncertainty

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IMEKO-WC-2012-TC14-P10.pdf

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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