THERMAL ERROR ANALYSIS OF PRECISION INTERFEROMETRIC LENGTH MEASUREMENT SYSTEMS

A. Jakstas, S. Kausinis, A. Kasparaitis, R. Barauskas, A. Barakauskas

Abstract

The paper describes the practical application of thermal error analysis for precision length measurement systems operating in non-ideal environments. Finite element analysis and experimental investigations are carried out to examine the essence of thermal process and to demonstrate the existence and feasibility of the thermal modal analysis in precision line scale calibration system.

Keywords

line scale calibration, thermal error analysis

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IMEKO-WC-2012-TC14-O14.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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