DESIGN VALUE USE TYPE SUPER-RESOLUTION OPTICAL INSPECTION FOR MICROFABRICATED STRUCTURE DEFECTS BY USING STANDING WAVE ILLUMINATION SHIFT

R. Kudo, S. Takahashi, K. Takamasu

Abstract

The demand which detects the defect of a detailed structure is increasing. However the resolution of the general optical inspection method is not enough. In order to raise resolution, utilizing the advantage of optical detection, we proposed the novel optical inspection method. Although the steady value was conventionally set up as an initial value of processing, a design value is set as an initial value in this research. As a result, highly precise defective detection is attained rather than the conventional technique. Moreover, the possibility of the detection using low magnifying power is confirmed.

Keywords

standing wave illumination, image reconstruction, super-resolution, designed value

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IMEKO-WC-2012-TC14-O8.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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