ESTABLISHMENT OF THE ENGINEERING RELIABILITY EVALUATION SYSTEM FOR THE DEVELOPMENT OF UHV PUMPS

J. Y. Lim, S. Y. In, S. K. Lim, W. Cheung

Abstract

Engineering reliability evaluation system has been under establishment for the development of ultrahigh (UHV) vacuum pumps such as 3,600 L/s cryo and 2,500 L/s turbo-molecular pumps (TMP). This paper briefly addresses the utilization of the characteristics evaluation system already developed in KRISS to design, characterize, and establish the reliability evaluation system through two project years ahead. The purpose ensured of the main national project is the completion of the commercialization of UHV pumps in recognition of international engineering reliability.

Keywords

engineering reliability, Cryo pump, high vacuum, characteristics evaluation

Download

IMEKO-WC-2012-TC16-P8.pdf

DOI

-

IMEKO TC

TC16 - Pressure and Vacuum Measurement

Back to the proceedings