PRIMARY VACUUM STANDARD CMI FOR UHV PRESSURE RANGE 1 × 10^-6 TO 1 × 10^-10 Pa

T. Gronych, L. Peksa, M. Jeráb, Z. Krajícek, D. Pražák, F. Stanek, M. Vicar, J. Tesar

Abstract

A primary vacuum standard for UHV pressure range is under development in Czech Metrology Institute (CMI). In order to cover the UHV range down to the limit 1 × 10^-10 Pa a method of calibration in non-equilibrium gas (so called dynamic extension method) was employed. The apparatus is divided into three parts: the dynamic extension stage, the orifice flow standard and the flowmeter. The dynamic extension stage is designed as an XHV apparatus manufactured from a low outgassing rate material – beryllium copper alloy. A special 4 K bakeable refrigerator cryopump is used as the main pump.

Keywords

primary vacuum standard, vacuum gauge calibration in UHV range

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IMEKO-WC-2012-TC16-P4.pdf

DOI

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IMEKO TC

TC16 - Pressure and Vacuum Measurement

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