PRELIMINARY STUDY FOR LOW VACUUM AND PRESSURE MEASUREMENT USING ULTRASONIC ACOUSTIC TRANSDUCERS

S. S. Hong, B. Y. Ahn, S. H. Cho, H. W. Song, I. M. Choi

Abstract

New pressure measurement technique using acoustic impedance ultrasonic transducers was studied. Aircoupled ultrasonic transducers of 500 kHz frequency were used in the pressure range 1.33 × 10³ Pa – 2.03 × 10⁵ Pa. In the pressure range almost linearly proportional results were obtained for all five He, N₂, Dry air, Ar, and Kr gases. It is suggested that the ultrasonic transducers can be successfully used for pressure measurements as it has many advantages against other measurement methods.

Keywords

vacuum, pressure, ultrasonic transducer, gas sensitivity

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IMEKO-WC-2012-TC16-P5.pdf

DOI

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IMEKO TC

TC16 - Pressure and Vacuum Measurement

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