STEP RESPONSE OF VACUUM SENSORS – A PRELIMINARY STUDY

Fredrik Arrhén

Abstract

The development of a system for determining step response of total vacuum gauges is described as well as results for some typical vacuum gauges. The system is mainly suitable for steps from atmospheric pressure down to around 50 Pa. Step response times reached with the system are (with reasonable sizes of DUT internal volumes) about 20 ms.

Keywords: vacuum gauge, dynamic pressure, step response
Download: IMEKO-WC-2012-TC16-O8.pdf
DOI: -
IMEKO TC: TC16 - Pressure and Vacuum Measurement

Event details

Event: XX IMEKO World Congress
Place: Busan, REPUBLIC of KOREA
Time: 9 September 2012 - 12 September 2012
Website: http://imeko2012.kriss.re.kr

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