ENHANCED MEASUREMENT OF HIGH ASPECT RATIO SURFACES BY APPLIED SENSOR TILTING

A. Schuler, A. Weckenmann, T. Hausotte

Abstract

During tactile surface measurements the contact point between probing tip and surface varies depending on the local surface angle. To reduce the resulting measurement deviation on high slopes a probing principle is investigated that applies a dynamic surface dependent sensor tilt. This probing process and the logics for the angle determination have been simulative evaluated. A test stand based on a nanometer coordinate measuring machine is developed and fitted with a rotation kinematic based on stacked rotary axes. Systematic positioning deviations of the kinematic are reduced by a compensation field. The test stand has been completed and results are presented.

Keywords

profilometry, servo system, uncertainty, simulation

Download

IMEKO-WC-2012-SS2-O1.pdf

DOI

-

Back to the proceedings