A LARGE RANGE METROLOGICAL ATOMIC FORCE MICROSCOPE WITH NANOMETER UNCERTAINTY

S. Gao, M. Lu, W. Li, Y. Shi, X. Tao

Abstract

A metrological atomic force microscope (AFM) with 50 mm × 50 mm × 2 mm scan range has been designed and constructed. In this paper, the structure and preliminary results are introduced. The precise movement of the sample is driven by a piezoelectric motion stage and air-bearing stage for different scanning range. Four multi-pass homodyne interferometers attached to the metrological frame measure the relative displacement between the probe and sample. A novel AFM head is used to detect the topography at contact mode. Step height standard is measured and the results show that the system is capable of measuring step height with uncertainty of 4 nm.

Keywords

nanometrology, AFM, nanostructure, interferometer

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IMEKO-WC-2012-SS2-O7.pdf

DOI

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