THERMOPOWER MEASUREMENT OF SINGLE NANOWIRE USING A MEMS DEVICE

Ho Sun Shin,Joon Sung Lee,Seong Gi Jeon,Jin Yu, Jae Yong Song

Abstract

We have fabricated a MEMS device on suspended silicon nitride in order to measure the thermoelectric properties of single nanowire. The temperature gradient was generated by a nanoheater and the temperatures of thermometers were calibrated and measured. Seebeck coefficient and electrical conductivity of single Bi2Te3 nanowire with a 70 nm-diameter were measured in the temperature range of 50 K to 400 K. Based on the simulation results of the temperature distribution over the MEMS structure, the method of calibrating the temperature and measurement uncertainty are discussed.

Keywords

nanowire, MEMS, thermal simulation, thermopower

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IMEKO-WC-2012-SS2-O8.pdf

DOI

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