DEVELOPMENT OF CAPACITIVE TYPE MEMS MICROPHONE WITH SIMULATION AND ELECTRO-MECHANICAL CHARACTERIZATION

Youngdo Jung, Young Hwa Lee, Junhyuk Kwak, Shin Hur

Abstract

Capacitive type MEMS microphone was designed, fabricated and characterized. Finite element model was used in the design process of the MEMS microphone and the fabrication was carried out using MEMS fabrication process including low stress silicon nitride membrane deposition and eutectic bonding process. The simulation results show that the designed MEMS microphone has the resonant frequency above the operation frequency range and the sensitivity of 9.1 mV/Pa (@18V). The experimental results show that the MEMS microphone has 3 dB cut-off frequency of 144 kHz.

Keywords

MEMS, microphone, capacitive, finite element model

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