DEVELOPMENT OF STANDARD MEASUREMENT PROTOCOL FOR THE SIZE ANALYSIS OF SiO₂ NANOPARTICLES USING A SCANNING ELECTRON MICROSCOPY

Hyuksang Kwon, Soo Jin Kim, Eun Ji Noh, Seon Hwa Park, Nam Woong Song

Abstract

The size and size distribution of materials are important factors for understanding the characteristics of nanomerterials. Although transmission electron microscopy (TEM) is a powerful tool for determining the nanomaterial size, the nanoparticle cast on carbon-film for the TEM sampling exhibits limitation in size measurement due to agglomeration during the solvent elimination. By using scanning electron microscopy (SEM), such limitation can be overcome by modifying the surface of substrate for sampling. Here, we show that the size measurement of well-defined SiO₂ nanoparticles could be performed with minimized sampling issues. The experimental conditions such as a working distance, an accelerating voltage, a filament current and a metal coating were adjusted to optimize imaging condition. Experimental uncertainties were also derived from the consideration of uncertainty factors and measurement of CRM for SEM imaging.

Keywords

SEM, SiO2, nanomaterial, size, working distance, accelerating voltage, metal coating

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