DIFFERENTIAL STRAIN GAGE – A NEW SENSOR DEVICE FOR MICROSYSTEMS

Martin Stockmann, Ingolf Mönch

Abstract

The paper describes an operating principle for the electrical measurement of mechanical strain states. This principle gives up the idea of measuring the strain-induced resistance change of single wire conductors and passes on to determining the strain-induced deformation of the electrical field in area conductors. The basic operating principle, sensitivity considerations and the design of a functional prototype are described. Several experimental results in the application fields of transducer technology demonstrate the high capability of this method.

Keywords

strain gage, sensor design, transducer technology, microsystems

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IMEKO-YSESM-2012-K07.pdf

DOI

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IMEKO TC

TC15 - Experimental Mechanics

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