3D SURFACE INSPECTION WITH A DMD BASED SENSOR

F. Bitte, H. Mischo, T. Pfeifer, G. Frankowski

Abstract

In this paper a method for non-contact scanning of small structures is presented similar to that of confocal microscopy but using the technology of Digital Micromirror Devices (DMD) instead of ordinary pinholes. It offers parallel scanning of various specimen following to a principle, where a DMD is used for illumination and a selective CCD for detection. The fundamental concepts concerning system layout and system performance as well as measurement results with a first experimental demonstrator are presented.

Keywords

metrology, surface inspection, confocal microscope, digital micromirror device, DMD, micro-systems technology

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IMEKO-WC-2000-TC2-P031.pdf

DOI

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IMEKO TC

TC2 - Photonics

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