THE DIFFRAXICON-INTERFEROMETER FOR CYLINDER TESTS

S. Brinkmann, T. Dresel, R. Schreiner, J. Schwider

Abstract

The shape measurement of technical cylinder mantle surfaces requires special measures to obtain a spatially low frequency interferogram indicating the shape deviations from an ideal cylinder surface. For this purpose the use of diffraxicons is proposed and demonstrated. The surface roughness is sufficiently eliminated by grazing incidence interferometry for high quality surfaces becoming more and more essential for high accuracy applications as e.g. in the nanotechnology and modern lithography.

Keywords

interferometry, computer-generated holograms, interferometric cylinder test

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IMEKO-WC-2000-TC2-P032.pdf

DOI

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IMEKO TC

TC2 - Photonics

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