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PECULIARITIES OF CYLINDER DIAMETER DETERMINATION BY DIFFRACTION METHOD

Y. V. Chugui, A. A. Pavlov

Abstract

The detailed analysis of diffraction pattern in far zone for circular absolutely reflecting metal cylinder with regard to the influence of wave reflected from its surface is presented. The method of stationary phase was used when calculating the reflected component of the input field. The behaviour of diffraction pattern minima for wide range of angles is studied. The formula for angular position of minima in case of small observation angles was found. Three algorithms of cylinder diameter reconstruction using its diffraction pattern were proposed. They allow theoretically to increase appreciably the accuracy of the dimensional measurements.

Keywords
Fraunhofer diffraction, cylinder, optical inspection, laser metrology
Download
IMEKO-WC-2000-TC2-P033.pdf
DOI
-
IMEKO TC
TC2 - Photonics

Event details

Event
XVI IMEKO World Congress
Place
Vienna, AUSTRIA
Time
25 September 2000 - 28 September 2000

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