LOW-COHERENT INTERFEROMETRY DEFECTS MEASUREMENTS

I. V. Golubev, E. V. Sysoev, Y. V. Chugui

Abstract

Profile measurement of the surface defects (with the depth of dozens of microns), based on the low-coherent interferometry, is discussed in this paper. The major challenge for production of such devices is selecting interference zones, which are used to determine the isolines of the defect depth. A direct way to find lowcontrast interference zones in a large dynamic light range appears to be an extremely difficult procedure. We propose an effective interference zones localization technique based on the reference wave phase modulation that against others provides high measurement accuracy and reliability. The reconstructed 3D-image and depth isoline map of 50 µm deep defect on the metallic surface of the fuel element are also presented.

Keywords

surface defects, interferometry

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IMEKO-WC-2000-TC2-P037.pdf

DOI

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IMEKO TC

TC2 - Photonics

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